| 摘要 |
PROBLEM TO BE SOLVED: To increase the capacitance if the area in plan view of the element is equal and make it smaller if the capacitance is equal by coaxially providing a second columnar conductive film in a first tubular conductive film. SOLUTION: The element has a lower electrode comprising a first tubular conductive film 18 and second columnar conductive film 22 coaxially disposed in the first film. This makes it possible to increase the memory cell capacitance even for a DRAM too fine to realize a double tube, compared with that in prior art and hence increase the capacitance if the area in plan view of the element is equal and make it smaller if the capacitance is equal. |
