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发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09321047(A)
申请公布日期
1997.12.12
申请号
JP19960153298
申请日期
1996.05.24
申请人
NEC CORP
发明人
HAYASHI MIKIJI
分类号
H01L21/3205;H01L21/304;H01L21/3105;H01L21/768;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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