| 摘要 |
PROBLEM TO BE SOLVED: To improve abrasion resistance of a roller and a vane, improve reliability and save electric power by reduction of frictional resistance by forming a carbon element binder whose hardness is a specified value or more, and a film having a prescribed rate, on the outer diameter part of the roller as the contact part of the roller and the vane. SOLUTION: By contact friction of a roller 6 and a vane 7, surface preparation method such that hard film is formed on the surface of the roller 6 is carried out due to reduce outer diameter abrasion of the roller 6. Namely, when abrasion is generated on the outer diameter of the roller 6, high pressure gas is returned to a low pressure side in a cylinder 9, compression failure is generated, and then a function as a compressor is eliminated. Carbon atom binder whose hardness is 3000HV or more is stuck on the surface of the roller 6 about 0.5 to 2μm. The film is molded in such a way that hydrocarbon gas is decomposed by ark discharge plasma in high vacuum, and sticking is carried out. It is thus possible to improve abrasion resistance and lubrication resistance of the contact part of the vane 7, and it is also possible to save electric power by reduction of frictional force.
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