发明名称 |
STORAGE BOX FOR AN OBJECT TO BE PROTECTED FROM PHYSICAL/CHEMICAL CONTAMINATION |
摘要 |
The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers. |
申请公布号 |
EP0804801(A1) |
申请公布日期 |
1997.11.05 |
申请号 |
EP19960939148 |
申请日期 |
1996.11.19 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;L'AIR LIQUIDE S.A. |
发明人 |
SPINELLI, PHILIPPE;DOCHE, CLAUDE;ROSTAING, JEAN-CHRISTOPHE;COEURET, FRANCOIS;SCOTTO D'APOLONIA, SYLVAIN |
分类号 |
B65D85/86;H01L21/673;(IPC1-7):H01L21/00 |
主分类号 |
B65D85/86 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|