| 摘要 |
PROBLEM TO BE SOLVED: To ensure a clean environment for a wafer in a semiconductor production line system and improve the productivity of the entire line. SOLUTION: A hermetic pod adaptive to a minienvironment is used at bay- to-bay transport and stock works. In a stoker the pod is opened and closed to take out cassettes which are then carried by an AGV etc., into a bay and fed to processors. The cleanness in the bay is kept at a high level, while the cleanness in a transport zone between the bays may be dropped to a medium level, thus reducing the power consumption of FFU. Thus it is possible to improve the cleanness around the wafer and suppress the apparatus size and cost from rising. |
