| 摘要 |
PROBLEM TO BE SOLVED: To control a wafer housing station and to enable wafers which are not normally processed to be collectively processed by a method wherein a wafer transfer means is controlled basing on the stored processing data as to wafers. SOLUTION: When a control 12 judges that a wafer 14 is completely processed, the wafer 14 is housed in a wafer carrier 13A, and processing data as to the wafer 14 housed in a wafer carrier 13A are stored in a memory 17. On the other hand, when a control 12 judges that a wafer 14 is not completely processed, the wafer 14 is housed in a wafer carrier 13B, and processing data as to the wafer 14 housed in a wafer carrier 13B are stored in the memory 17, and moreover processing progress data, error data, and housing station data after reprocessing as to the wafer 14 are stored in the memory 17. At this point, when the control 12 judges that a wafer 14 is not completely processed, the wafer 14 is housed in a wafer carrier 13B, and when the control 13 judges that a following wafer 14 is completely processed, the control 3 controls an unloading arm 23 so as to make housing room in the wafer carrier 13A for the wafer 14 and to house the wafer 14 in the wafer carrier 13A. |
