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发明名称
IIIVIZOKUKAGOBUTSUCHOKOSHINOSEIZOHOHO
摘要
申请公布号
JP2657513(B2)
申请公布日期
1997.09.24
申请号
JP19880063406
申请日期
1988.03.18
申请人
MITSUBISHI KAGAKU KK
发明人
TAGUCHI TSUNEMASA
分类号
C30B25/02;C23C16/44;C23C16/455;C30B29/48;C30B29/68;H01L21/365;(IPC1-7):C30B29/48
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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