| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide the surface analyzer, which suppresses the effect of surface charging and can take the measurement even for samples such as insulators. SOLUTION: This device has at least an ionizing radiation source 1, a measuring means 4, which measures the charged particles discharged from a sample by the irradiation of the ionizing radiation from the ionizing radiation source 1, and a charge neutralizing means 7, which neutralizes the charging of the surface of the sample. The charge neutralizing means measures the peak of the discharged electrons from a reference element on the sample surface or embedded in the interior of the surface and feed back the signal information. Thus, the amount of the irradiated electrons, the kinetic energy of the electrons and the like are automatically adjusted. Therefore, the neutralizing conditions can be quickly set in correspondence with the fluctuation and the distribution of the charge state, and the accurate surface analysis can be performed in a short time.</p> |
