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发明名称
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要
申请公布号
JPH09237830(A)
申请公布日期
1997.09.09
申请号
JP19960041916
申请日期
1996.02.28
申请人
SONY CORP
发明人
KAWASHIMA ATSUSHI
分类号
H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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