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经营范围
发明名称
FILM FORMING METHOD
摘要
申请公布号
JPH09232305(A)
申请公布日期
1997.09.05
申请号
JP19960034574
申请日期
1996.02.22
申请人
HITACHI LTD
发明人
SUZUKI YASUMICHI
分类号
H01L21/31;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L21/316
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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