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发明名称
ACCELERATION TYPE PLASMA GUN
摘要
申请公布号
JPH09223474(A)
申请公布日期
1997.08.26
申请号
JP19960029758
申请日期
1996.02.16
申请人
SUMITOMO HEAVY IND LTD
发明人
SAKAMI TOSHIYUKI
分类号
H05H1/24;C23C14/32;H01J27/20;H01J37/077;H01J37/08;(IPC1-7):H01J37/077
主分类号
H05H1/24
代理机构
代理人
主权项
地址
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