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发明名称
Vorrichtung zur Dampfphasenabscheidung
摘要
申请公布号
DE69126724(D1)
申请公布日期
1997.08.14
申请号
DE19916026724
申请日期
1991.03.19
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP
发明人
SATO, YUUSUKE, C/O INTELLECTUAL PROPERTY DIVISION, MINATO-KU, TOKYO 105, JP;OHMINE, TOSHIMITSU, C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP
分类号
C23C16/44;C23C16/455;C23C16/458;C23C16/48;(IPC1-7):C23C16/44;C23C16/46
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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