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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2638546(B2)
申请公布日期
1997.08.06
申请号
JP19950040186
申请日期
1995.02.28
申请人
NIPPON DENKI KK
发明人
YAMADA YOSHIAKI
分类号
H01L21/28;H01L21/304;H01L21/3205;H01L21/768;(IPC1-7):H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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