AUTOMATIC FOCUSING MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To simultaneously obtain an optimum focusing state and an optical exposure state. SOLUTION: An optical image from a sample 2 on a stage 1 is caught by an objective lens 3 and split to three optical paths by a splitting prism 6 through an image forming lens 5. By two optical paths out of them, the deviating direction of a focus and the deviation amount thereof are obtained based on difference between a contrast level obtained by a contrast computer element 10 corresponding to an electric output from an image sensor 7 on which the optical image at the back part of a scheduled focal plane is projected and a contrast level obtained by a contrast computer element 12 corresponding to an electric output from an image sensor 9 on which the optical image at the front part of the scheduled focal plane is projected. On the other hand, the exposure time of a photographing time is obtained based on the quantity of light received from a received light quantity computer element 11 corresponding to an electric output from an image sensor 8 on which the optical image of the scheduled focal plane of the rest optical path of the prism 6 is projected.