Piezoelectric/electrostrictive element having auxiliary electrode disposed between piezoelectric/electrostrictive layer and substrate

摘要

A piezoelectric/electrostrictive element is disclosed which includes: a ceramic substrate (12) formed principally of partially or fully stabilized zirconia; a lower electrode (14) formed on the ceramic substrate; a piezoelectric/ electrostrictive layer (16) formed on the lower electrode; and an upper electrode (18) formed on the piezoelectric/ electrostrictive layer. The element further includes an auxiliary electrode (22) formed on the ceramic substrate, apart from the lower electrode, such that a portion of the auxiliary electrode is located between the piezoelectric/ electrostrictive layer and the ceramic substrate. The auxiliary electrode is formed of an electrically conductive material which permits sufficiently good adhesion of the auxiliary electrode to the ceramic substrate and the piezoelectric/electrostrictive layer. The upper electrode extends between and is electrically connected to the piezoelectric/electrostrictive layer and the auxiliary electrode.