Micromechanical tuning fork angular rate sensor

摘要

A micromechanical tuning fork gyroscope includes a suspended structure comprising at least first and second vibratable structures. Each vibratable structure is energizable to vibrate laterally, within a first plane, along an axis normal to the rotation sensitive axis. The lateral or inplane vibration of the first and second vibratable structures effects simultaneous vertical or rotational movement of at least a portion of the suspended structure upon the occurrence of angular rotation of the gyroscope about the rotation sensitive axis. Vertical or rotational movement of the suspended structure is sensed, and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.