GAS PURGE SYSTEM FOR ISOLATION ENCLOSURE FOR CONTAMINATION SENSITIVE ITEMS,申请号KR19930016480-传众专利搜索

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发明名称	GAS PURGE SYSTEM FOR ISOLATION ENCLOSURE FOR CONTAMINATION SENSITIVE ITEMS
摘要
申请公布号	KR970008325(B1)	申请公布日期	1997.05.23
申请号	KR19930016480	申请日期	1993.08.24
申请人	INTERNATIONAL BUSINESS MACHINES CORP.	发明人	DEANGELIS, ROBERT L.;GALLAGHER, GARY M.
分类号	B65B55/00;B65D8/18;B65D81/20;B65D85/57;B65D85/86;H01L21/02;H01L21/673;(IPC1-7):H01L21/00	主分类号	B65B55/00
代理机构		代理人
主权项
地址

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