TRANSFER DEVICE, TRANSFER METHOD, PROCESSING DEVICE, AND PROCESSING METHOD

摘要

A transfer device for transferring a plurality of objects to be transferred from a first supporting body which supports a plurality of objects to a second supporting body which supports a plurality of objects, comprising a transfer-in/out means which transfers the objects one by one from the first supporting body at a first position at which the objects can be transferred out from the first supporting body and transfers the objects one by one to the second supporting body at a second position at which the objects can be transferred to the second supporting body, a third supporting body which is provided so that the transfer-in/out means can transfer in and out the objects and can support a plurality of objects, and a moving means which moves the transfer-in/out means from the first position to the second position. Thus a transfer device and a transfer method such that objects are transferred in a short time, and a processing device and a processing method such that the throughput is improved.