发明名称 Superconductor thin film and manufacturing method
摘要 Bi-Ti-O or Bi-W-O thin film of stable crystal phase is manufactured by forming a Bi-Ti-O of Bi-W-O thin film periodically in an environment including activated oxygen. A layered structure of Bi-Sr-Ca-Cu-O thin films and Bi-Ti-O or Bi-W-O thin films is manufactured by forming a Bi-Ti-O of Bi-W-O thin film periodically in an environment including activated oxygen. A stable superconductor thin film of high superconducting transition temperature is manufactured reproducibly by layering alternately a layered oxide superconductor thin film of Tl-Ba-Ca-Cu-O system and a Bi-W-O insulator thin film. <IMAGE>
申请公布号 EP0640994(B1) 申请公布日期 1997.05.07
申请号 EP19940116712 申请日期 1992.06.02
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 ICHIKAWA, YO;SETSUNE, KENTARO;ADACHI, HIDEAKI
分类号 C23C14/00;C23C14/08;C30B23/02;H01L39/12;H01L39/24 主分类号 C23C14/00
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