发明名称 Heated pressure transducer assembly
摘要 The disclosed heated pressure transducer includes an external enclosure, a first thermal shell housed within the external enclosure, and a sensor housed within the first thermal shell. The transducer further includes a heater for heating the first thermal shell and a control unit for controlling the heater. A tube couples the sensor to a source of heated, pressurized gas and the transducer may further include a tube-heater that is controlled by the control unit for applying heat to the tube. The transducer may also include a second thermal shell housed within the external enclosure with at least a portion of the control unit being housed within the second thermal shell. A heater that is controlled by the control unit may be disposed proximal to the second thermal shell for heating that shell. An auxiliary heater disposed within the first thermal shell for heating the sensor may also be included. Two thermistors may also be included for measuring the temperature of the sensor and the first thermal shell.
申请公布号 US5625152(A) 申请公布日期 1997.04.29
申请号 US19960585535 申请日期 1996.01.16
申请人 MKS INSTRUMENTS, INC. 发明人 PANDORF, ROBERT C.;DEMONE, ARCHIBALD J.;THOMAS, FRANK W.;BLANKENSHIP, STEVEN D.
分类号 G01L9/12;G01L7/00;G01L9/00;G01L19/00;G01L19/04;G01L19/14;(IPC1-7):G01L7/00 主分类号 G01L9/12
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