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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09106961(A)
申请公布日期
1997.04.22
申请号
JP19950263731
申请日期
1995.10.12
申请人
HITACHI DENSHI LTD
发明人
SAINO NOBUYUKI
分类号
H01L21/28;H01L21/312;H01L21/316;H01L21/3205;H01L21/768;(IPC1-7):H01L21/28;H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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