| 摘要 |
While relatively transporting a wire to be inspected and a unit including a first light source for emitting a first beam, a second light source for emitting a second beam which intersects with said first beam at a predetermined reference position, and a photodetector for detecting reflection light of said first and second beams derived from said first and second light sources respectively, a relative position between said unit and said wire is detected as a first position when said first beam is reflected from said wire. Then, while relatively moving said unit and said wire, another relative position between said unit and said wire is detected as a second position when said second beam is reflected from said wire. Then, a height of said wire from said reference position is calculated based on an interval between said first and second positions.
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