CAPACITANCE MEASURING PATTERN AND ITS MEASURING METHOD FOR SEMICONDUCTOR DEVICE,申请号JP19950226850-传众专利搜索

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发明名称	CAPACITANCE MEASURING PATTERN AND ITS MEASURING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH0974122(A)	申请公布日期	1997.03.18
申请号	JP19950226850	申请日期	1995.09.04
申请人	SUMITOMO METAL IND LTD	发明人	HIROTA YOSHIHIRO
分类号	G01R27/26;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L21/66	主分类号	G01R27/26
代理机构		代理人
主权项
地址

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