| 摘要 |
PURPOSE:To perform wide and uniform laser beam machining regardless of the mobile direction of a machining head or a machining table by making a laser beam with its reflection direction deviated from the optical axial direction of a condensing optical system incident on the condensing optical system and rotating a total reflection mirror in this state. CONSTITUTION:The laser beam 2 incident on the total reflection mirror 5 reflects in the inclined direction to the optical axial 7 direction of the condensing optical system 6 on the reflection surface 5a and the laser beam 2 formed to the oblique beam is made incident on the condensing optical system 6. As a result, the laser beam 2 is condensed on the position deviated from the optical axis 7 of the condensing optical system 6 on a material 9 to be machined. In this state, an X axis driving motor 11 and a Y axis driving motor 12 to move the machining table 10 are driven by a driving device 13 in accordance with a machining shape and while moving the material 9 to be machined, a rotating signal is sent from the driving device 13 to a rotating device 8 to rotate the total reflection mirror 5 at the same time. By this rotation, since the laser beam 2 reflected by the total reflection mirror 5 rotates conically with the optical axis 7 of the condensing optical system 6 as a center, a locus 14 of a condensing point of the laser beam 2 on the material 9 to be machined obtains a working width in accordance with the rotating diameter. |
