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发明名称
摘要
申请公布号	JP2578519(B2)	申请公布日期	1997.02.05
申请号	JP19900141349	申请日期	1990.06.01
申请人	HITACHI LTD	发明人	HAYAKAWA HAJIME;NAKAMURA KAZUMITSU;ITO HIROYUKI
分类号	G21K5/00;G02B21/00;G03F7/20;G21K5/04;H01J37/304;H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	G21K5/00
代理机构		代理人
主权项
地址

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