发明名称 |
Electrostatic chuck |
摘要 |
Electrostatic chucks and methods of forming the chucks are disclosed. The chucks include ceramic materials directly bonded with a layer of active braze alloy. The active alloy operates as both a conductive layer of the electrostatic chuck and a mechanism for bonding the dielectric layer to the base of the chuck. Electrical feedthroughs to the electrode may also be formed using the active alloy.
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申请公布号 |
US5600530(A) |
申请公布日期 |
1997.02.04 |
申请号 |
US19940258232 |
申请日期 |
1994.06.10 |
申请人 |
THE MORGAN CRUCIBLE COMPANY PLC |
发明人 |
SMITH, PETER C. |
分类号 |
C04B37/02;B23K1/00;B25J15/06;H01L21/48;H01L21/683;H05K1/03;H05K1/11;H05K3/34;H05K3/40;(IPC1-7):H02N13/00 |
主分类号 |
C04B37/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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