| 摘要 |
PURPOSE: To provide a film-forming device for taking in a plurality of substrates into a film-forming device. CONSTITUTION: A multiple-room film-forming device with a plurality of film- forming rooms 2 and 3 has one load room 1 for loading substrates into and out of the outside of the film-forming device and a plurality of film-forming rooms 2 and 3 via gates 21 and 31 and a substrate standby position 12 for tentatively retaining the substrates and a substrate transfer mechanism 11 for carrying the substrates, one substrate is tentatively retained at the substrate standby position 12, and the substrate can be moved within the film-forming device of the other substrate by a substrate carrying mechanism 11, thus performing film-forming treatment to each substrate with a plurality of substrates incorporated in the film-forming device. |
