发明名称 BEAM STOP APPARATUS FOR AN ION IMPLANTER
摘要 An ion beam absorbing apparatus for an ion implanter comprises an ion absorber for absorbing ions in an ion beam generated by the ion implanter, and support means for supporting the ion absorber and adapted for connection with the ion implanter, so that when so connected, the ion absorber can intercept the ion beam and absorb ions not intercepted by a target to be implanted with beam ions. The support means is further adapted for supporting the ion absorber in a plurality of different positions which can be selected so that respective different parts of the ion absorber intercept the ion beam.
申请公布号 WO9641364(A1) 申请公布日期 1996.12.19
申请号 WO1995GB01309 申请日期 1995.06.07
申请人 APPLIED MATERIALS, INC.;BURGIN, DAVID, R.;ENGLAND, JONATHAN, G.;WAUK, MICHAEL, T.;TODAKA, RYOJI 发明人 BURGIN, DAVID, R.;ENGLAND, JONATHAN, G.;WAUK, MICHAEL, T.;TODAKA, RYOJI
分类号 H01J37/30;H01J37/317 主分类号 H01J37/30
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