发明名称 |
Doping of IIB-VIA semiconductors during molecular beam epitaxy electromagnetic radiation transducer having p-type ZnSe layer |
摘要 |
An electromagnetic radiation transducer is provided having a p-type ZnSe layer and an n-type layer. The p-type ZnSe layer has a net donor to net acceptor ratio (ND/NA) of less than or equal to about 0.8. The net acceptor concentration is greater than about 5x1015cm -3 and the resistivity is less than 15 OMEGA -cm. The p-type ZnSe layer is deposited by doping the ZnSe during fabrication with a neutral free-radical source.
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申请公布号 |
US5574296(A) |
申请公布日期 |
1996.11.12 |
申请号 |
US19930095872 |
申请日期 |
1993.07.21 |
申请人 |
MINNESOTA MINING AND MANUFACTURING COMPANY;UNIV FLORIDA |
发明人 |
PARK, ROBERT M.;DEPUYDT, JAMES M.;CHENG, HWA;HAASE, MICHAEL A. |
分类号 |
C30B23/02;H01L21/363;H01L33/00;H01L33/28;H01S5/00;H01S5/042;H01S5/30;(IPC1-7):H01L33/00;H01L29/22;H01L31/032;H01L31/00 |
主分类号 |
C30B23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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