发明名称 Doping of IIB-VIA semiconductors during molecular beam epitaxy electromagnetic radiation transducer having p-type ZnSe layer
摘要 An electromagnetic radiation transducer is provided having a p-type ZnSe layer and an n-type layer. The p-type ZnSe layer has a net donor to net acceptor ratio (ND/NA) of less than or equal to about 0.8. The net acceptor concentration is greater than about 5x1015cm -3 and the resistivity is less than 15 OMEGA -cm. The p-type ZnSe layer is deposited by doping the ZnSe during fabrication with a neutral free-radical source.
申请公布号 US5574296(A) 申请公布日期 1996.11.12
申请号 US19930095872 申请日期 1993.07.21
申请人 MINNESOTA MINING AND MANUFACTURING COMPANY;UNIV FLORIDA 发明人 PARK, ROBERT M.;DEPUYDT, JAMES M.;CHENG, HWA;HAASE, MICHAEL A.
分类号 C30B23/02;H01L21/363;H01L33/00;H01L33/28;H01S5/00;H01S5/042;H01S5/30;(IPC1-7):H01L33/00;H01L29/22;H01L31/032;H01L31/00 主分类号 C30B23/02
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