| 摘要 |
PURPOSE: To realize a manufacture of a thin film lamination electrode sheet manufacturing inexpensively a sheet of the high frequency electromagnetic field coupling type thin film lamination electrode, a high frequency resonator using the thin film lamination electrode and a transmission line. CONSTITUTION: The manufacture process includes a 1st process where thin film conductors E1, E2, E3 are formed to each lower face of plural thin film dielectric sheets D1, D2, D3, a 2nd process where plural thin film dielectric sheets with the thin film conductors E1-E3 formed to them are fixed overlappingly to the lower face of the thin film dielectric sheets D1-D3 so that each thin film dielectric sheet D1-D3 and each thin film conductor E1-E3 are alternately laminated, and a 3rd process where each thin film dielectric sheet D1-D3 and each thin film conductor E1-E3 fixed and in contact with each other are adhered together to form the high frequency electromagnetic field coupling type thin film lamination electrode sheet 1. The manufacturing device is provided with vacuum vapor-deposition devices S1, S2, S3, a fixing device 40, and a thermal press device H1. |
