| 摘要 |
PURPOSE: To provide an angular velocity sensor that is able to detect an angular velocity being made up easily and inexpensively, and acting on in a highly accurate manner, and made so as to be effectively utilizable for controlling the body of an automobile and a navigation system or the like after being mounted on the automobile or the like. CONSTITUTION: Two vibrators 10 and 11 as movable electrodes are formed on a semiconductor substrate 3 at a specified interval from another semiconductor substrate 1. Four fixed electrode parts 7a, 7b, 8 and 9 are formed by aluminum at a specified position of the semiconductor substrate 3, and four trench parts 4a to 4c are formed among these electrodes. In addition, each of capacitors is formed in space between the vibrators 10, 11 and the semiconductor substrate 1. In this constitution, an angular velocity is detected on the basis of a capacity variation due to variations in a gap between this vibrator 10 and the semiconductor substrate 1 as well as between the vibrator 11 and the semiconductor substrate 1. |
