| 摘要 |
Ferrite films (13) having excellent crystalline and magnetic properties are obtainable without high temperature (>500 DEG C) processing if an appropriate template layer (12) is deposited on a conventional substrate body (11) (e.g., SrTiO3, cubic zirconia, Si), and the ferrite is deposited on the annealed template. The template is a spinel-structure metal oxide that has a lattice constant in the range 0.79-0.89 nm, preferably within about 0.015 nm of the lattice constant of the ferrite. Exemplarily, a NiFe2O4 film was deposited at 400 DEG C on a CoCr2O4 template which had been deposited on (100) SrTiO3. The magnetization of the ferrite film at 4000 Oe was more than double the magnetization of a similarly deposited comparison ferrite film (NiFe2O4 on SrTiO3), and was comparable to that of a NiFe2O4 film on SrTiO3 that was annealed at 1000 DEG C. The ability to produce ferrite films of good magnetic properties without high temperature treatment inter alia makes possible fabrication of on-board magnetic components (e.g., inductor) on Si chips designed for operation at relatively high frequencies, e.g., >10 MHz, even at about 100 MHz. |
