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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08236620(A)
申请公布日期
1996.09.13
申请号
JP19950040177
申请日期
1995.02.28
申请人
NEC CORP
发明人
ITO SHINYA
分类号
H01L21/768;H01L23/522;H01L23/538;(IPC1-7):H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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