| 摘要 |
PURPOSE: To improve a soft magnetic characteristic after heat treatment at a specified temperature or below which is used for a magnetic core of a thin- film magnetic head and thereby provide a soft magnetic thin film which has a good anticorrosion, a low magnetic distortion, a high saturated magnetic flux density, and a high adhesion with a base substrate by introducing steam for a sputtering gas instead of oxygen. CONSTITUTION: A soft magnetic thin film which is represented by a composition formula (Fea Mb Cuc Rud )e Nf Og (a, b, c, d, e, f, and g are composition ratios expressed by atomic %, M is a rare earth element such as Si, Al, Ta, B, Mg, Ca, Sr, Cr, Mn, Zr, Nb, Ti, Mo, V, W, Hf, Ga, and Ge) is formed by reactive sputtering using nitrogen and steam, under the condition that 0<=b<=5, 0<=c<=8, 0<=d<=5, 0<=c+d<=8, a+b+c+d=100, 0.5<=f<=15, 0.1<=g<=13, and e+f+g=100. This soft magnetic film is used for a lower magnetic core 1 and an upper magnetic core 2 in a thin-film magnetic head. |
