发明名称 Pad removal device
摘要 A tool for removing a polishing pad adhesively attached to a rotatable platen including a base, a lever member, at least one canted or angled latch pin, a chain having a plurality of links or rings, means for clamping the pad, and stop pins. The base is substantially flat and is engageable with a top or contact surface of the pad. The stop pins are attached to the base and are engageable with the platen. The lever is pivotally attached to the base, and has at least one latch pin attached thereto. A latch pin is engageable with each of the links of the chain. One end of the chain is pivotally attached to the clamping means. In operation, a portion of the pad disposed proximate the distal portion of the platen, is pried away from the top surface of the platen, and the clamp means is attached thereto. The base is disposed onto the contact surface of the pad such that the stop pins are in brought into contact with the near edge of the platen. The lever is swung in a forward direction and a canted latch pin is engaged with a link of the chain. The lever is then pulled in a rearward direction thereby pulling the pad from the top surface of the platen. As the lever is pulled in a rearward direction, the stop pins engage the platen and prevent the base from moving in a forward direction on the pad. The lever is rotated to the maximum extent of its travel then the canted latch pin is disengaged from the link. The lever is then swung forward and into engagement with another link of the chain. The operation is repeated until the pad is removed from the platen.
申请公布号 US5551136(A) 申请公布日期 1996.09.03
申请号 US19950421587 申请日期 1995.04.12
申请人 ADVANCED MICRO DEVICES, INC. 发明人 BARTLETT, STEVE
分类号 B24B37/04;(IPC1-7):B66F3/00 主分类号 B24B37/04
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