A method for fabricating a Josephson device

摘要

In a method of producing a superconductive device with a Josephson junction, by forming a main surface step on or in a substrate and depositing a layer on said substrate and main step, such that a thin region defining a Josephson junction is formed, said layer of superconducting material is formed by forming a first thin film layer of superconducting material on said substrate and main step and subsequently depositing superconducting material on said first thin film layer from an oblique direction from one side relative to the surface of said first thin film layer, whereby forming a second thin film layer and depositing superconducting material from an oblique direction opposite said first oblique direction relative to said first thin film layer, so as to form a third thin film layer and region of said first thin film layer not covered by said second and third thin film layers. <IMAGE>