PLASMA PROCESSOR AND PROCESSING METHOD,申请号JP19940302373-传众专利搜索

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发明名称	PLASMA PROCESSOR AND PROCESSING METHOD
摘要
申请公布号	JPH08162440(A)	申请公布日期	1996.06.21
申请号	JP19940302373	申请日期	1994.12.06
申请人	FUJITSU LTD	发明人	ISHIMARU YASUSHI
分类号	C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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