| 摘要 |
PURPOSE: To eliminate deformations and breaks, attain sure contact with an electrode to be measured, e.g. of a semiconductor, and correctly measure electric signals by layering and bonding insulating bodies and conductive bodies alternately with a predetermined pitch. CONSTITUTION: For example, four conductive bodies 1 and three insulating bodies 2 are alternately layered and bonded to form an electrode unit 6. At this time, the conductive bodies 1 are set to be outermost layers. The conductive body 1 is preferably a copper plate or copper foil having particularly superior conductive properties. The insulating body 2 is formed out of a plurality of molding prepregs obtained by impregnating a base material such as paper, cloth or the like ofαcellulose fibers with a thermosetting resin or heat-proof resin. Alternatively, a plate-like plastic of epoxy resin or polyimide is applied. In order to layer and bond the conductive bodies and insulating bodies, an adhesive is used or a vacuum press method, etc., is employed. When the molding prepreg is used, the vacuum press method is desirable. Since the conductive bodies 1 and insulating bodies 2 are integral, no deformation or break is generated and no shortcircuit is brought about between contact electrodes.
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