DRY ETCHING SYSTEM,申请号JP19940256799-传众专利搜索

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发明名称	DRY ETCHING SYSTEM
摘要
申请公布号	JPH08124901(A)	申请公布日期	1996.05.17
申请号	JP19940256799	申请日期	1994.10.21
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	YOSHINAGA MITSUHIRO;SUZUKI MASAKI;HARAGUCHI HIDEO;MATSUDA IZURU;TOYODA SHINICHIRO
分类号	C23F4/00;H01L21/302;H01L21/3065;H01L21/677;H01L21/68;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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