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发明名称
PHOTORESIST FILM
摘要
申请公布号
JPH0895239(A)
申请公布日期
1996.04.12
申请号
JP19940252945
申请日期
1994.09.20
申请人
NIPPON SYNTHETIC CHEM IND CO LTD:THE;MITSUBISHI ELECTRIC CORP
发明人
IZUMI TSUKASA;ARIMOTO HIRONOBU
分类号
G03F7/004;C09K11/54;C09K11/64;C09K11/78;G03F7/028;G03F7/033;H01J9/227;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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