发明名称 APPARATUS AND METHOD FOR SPUTTERING CARBON
摘要 <p>A hydrogenated carbon film for magnetic thin film recording media is manufactured by alternating current magnetron sputtering in an atmosphere containing argon and a hydrocarbon gas. Targets mounted side-by-side cyclically sputter and discharge charge buildup according to an alternating current. Shielding between the targets directs electrons toward the anode at a given time.</p>
申请公布号 WO1996009622(A2) 申请公布日期 1996.03.28
申请号 US1995012399 申请日期 1995.09.21
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