Array of micro-machined mass energy micro-filters for charged particles

摘要

An energy filter for charged particles includes a stack of micro-machined wafers including plural apertures passing through the stack of wafers, focusing electrodes bounding charged particle paths through the apertures, an entrance orifice to each of the plural apertures and an exit orifice from each of the plural apertures and apparatus for biasing the focusing electrodes with an electrostatic potential corresponding to an energy pass band of the filter.