| 摘要 |
<p>PURPOSE:To obtain the fine particles uniform in size, almost spherical in shape, also optimized in hardness and providing no mechanical damage on the surface to be abraded of a substrate even if an abrasion is made therewith. CONSTITUTION:An organometallic compound having metal-oxygen interatomic bond is subjected to emulsion polymerization to form metal oxide compound fine particles relatively low in hardness followed by forming therearound a metal oxide compound relatively high in hardness in a similar way, thus obtaining the fine particles optimized in hardness. For the present fine particles, the size distribution is limited within the range of average size 50% and the shape is almost spherical. By using a slurry containing the present fine particles, a substrate is subjected to chemical machinery abrasion to smooth this substrate.</p> |
