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发明名称
METHOD AND DEVICE FOR REMOVAL OF METAL IMPURITIES
摘要
申请公布号
JPH07335608(A)
申请公布日期
1995.12.22
申请号
JP19940142235
申请日期
1994.06.02
申请人
NEC CORP
发明人
MURAMATSU YOSHITOKU
分类号
C23F1/46;B01D15/00;H01L21/306;(IPC1-7):H01L21/306
主分类号
C23F1/46
代理机构
代理人
主权项
地址
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