SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE:To obtain a semiconductor manufacturing apparatus in which no trouble is caused in the operation of a plurality of processing devices (the operation of a manufacturing line) even when laser beam sources of any of the plurality of working devices are stopped while the plurality of processing devices are being operated. CONSTITUTION:Laser beam sources 11 to 15 the number of which is larger than that of a plurality of processing devices (aligners 41 to 44) to be operated are prepared with reference to the plurality of processing devices. A light distributor 20 which is composed of a plurality of movable mirrors or the like is installed between the plurality of processing devices and the plurality of laser beam sources. Laser beams from the individual laser beam sources the number of which corresponds to that of the processing devices out of the plurality of laser beam sources are supplied individually to the individual processing devices. In addition, the laser beams from a residual laser beam source (the spare light source 15) is supplied selectively to an arbitrary device out of the plurality of processing devices.