发明名称 |
Acceleration sensor |
摘要 |
An acceleration sensor and a method of making an acceleration sensor is described in which a movable sensor element is located in a hollow space formed in the middle of three silicon plates. During production, air can be removed from the hollow space through a hole in one of the two outer plates. The hole is then closed by an additional plate, which allows for a defined pressure to be set in the hollow space.
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申请公布号 |
US5461917(A) |
申请公布日期 |
1995.10.31 |
申请号 |
US19930131821 |
申请日期 |
1993.10.05 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
MAREK, JIRI;SCHUBERT, DIETRICH;BAUMANN, HELMUT;MUENZEL, HORST;OFFENBERG, MICHAEL;WILLMANN, MARTIN |
分类号 |
G01P15/02;G01P15/08;G01P15/125;H01L29/84;(IPC1-7):G01P15/125 |
主分类号 |
G01P15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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