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发明名称
FOREIGN MATTER INSPECTING METHOD
摘要
申请公布号
JPH07280739(A)
申请公布日期
1995.10.27
申请号
JP19940069464
申请日期
1994.04.07
申请人
MATSUSHITA ELECTRON CORP
发明人
FUKUMOTO HIROBUMI
分类号
G01N21/88;G01N21/94;G01N21/95;G01N21/956;H01L21/302;H01L21/304;H01L21/3065;H01L21/66;H01S3/00;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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