Process for purifying halosilanes

摘要

A process for purifying halosilanes consisting of contacting a mixture comprising a halosilane and a hydrocarbon with an adsorbent selective for the hydrocarbon, thereby reducing the hydrocarbon content of the mixture. The present process is particularly useful for removing hydrocarbon contaminates from chlorosilanes, where the hydrocarbon contaminates have a boiling point similar to that of the chlorosilanes.