发明名称 METHOD FOR MEASURING MOVING QUANTITY
摘要 PURPOSE:To measure the real moving quantity in a high temperature state within a reduced period of time by subtracting the thermal expansion generated during the measuring time from the measured displacement making use of the fact that the thermal expansion of an article to be measured at a high temperature can be approximated by a linear expression with the time as variable. CONSTITUTION:After an article 1 to be measured is heated to a prescribed temperature by an external temperature adjusting device 2, the displacement of the article 1 to be measured is measured during prescribed period of time t1 by a displacement meter 4, and the measurement H and the measuring time t1 are stored in an operating means 5, i.e., stored as the thermal expansion of the article 1 to be measured H=alpha.t1 (where, alphais a constant and the ratio of time change of the thermal expansion). Then, while the movement quantity (displacement) of the article 1 is measured, the force is applied to the article by a moving means to move the article during the prescribed period of time t2, and the displacement H' is outputted to the operating means 5. The operating means 5 substrates the total thermal expansion S, {S=alpha.(t1+t2)} from the raw data H' of measurement to obtain the true movement quantity L and realize the display 6. This constitution reduces the waiting time until the thermal expansion of each component is settled.
申请公布号 JPH07229732(A) 申请公布日期 1995.08.29
申请号 JP19940020241 申请日期 1994.02.17
申请人 NIKON CORP 发明人 DOMOTO TAKAHIRO
分类号 G01B11/00;G01B21/00;G01B21/02;G01D3/028 主分类号 G01B11/00
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