PROCESS OF PLASMA CHEMICAL REMOVAL OF FILMS OF PHOTORESIST,申请号SU19894750949-传众专利搜索

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发明名称	PROCESS OF PLASMA CHEMICAL REMOVAL OF FILMS OF PHOTORESIST
摘要
申请公布号	RU1653484(C)	申请公布日期	1995.08.20
申请号	SU19894750949	申请日期	1989.10.23
申请人	NAUCHNYJ FIZIKO-TEKHNOLOGICHESKIJ TSENTR	发明人	BUDYANSKIJ A.M.;POKROEV A.G.;EFREMOV A.N.;LEBEDEV E.A.;GOMZHIN I.V.
分类号	H01L21/306;(IPC1-7):H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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